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Systems, Instrumentation

Products

Manufacturer

Description of Products

Rollcoaters, Metallizers, Large pumping Systems,

R&D Roll Coaters

Darly Custom Technology, Inc.

SCT

Rollcoaters for 45” to 88” webs,

Metallizers from 40” to 72” dia.

Pumping Systems to 10,000 cfm

R&D Roll Coaters

CVD, RIE, Sputtering- Evaporation-, E-beam-Microwave CVD Systems

SCT

 

 

Sputtering-, E-Beam-, Evaporation-, RIE-, CVD-, Microwave Diamond Systems

Thin Film Deposition Systems

Small Thin Film Systems for Microscopy and R&D

SCT

E-Beam-, Sputtering- and Evaporators. Small Scale Diamond Systems. E-Guns, Sputter Sources, ECR Sources

e-beam Guns, High Voltage Power Supplies, Evaporation Controller and Filament Power Supplies

Telemark

e-beam Guns, High Voltage Power Supplies, Evaporation Controller and Filament Power Supplies, Misc. accessories

UHP Piping, Fittings, Process Piping to A3,

High Pressure to UHV

Flowmeca

(Distributor)

Gasket less piping for UHP installations, weld free installations of UHP Piping, In Place Cleaning, easy “Pigging”

Residual Gas Analyzers, RGA, Oxygen Sensors

Ametek

 

Low cost RGA, High end RGA’s, Inlet Systems, Clean Gas Oxygen Analyzers,

Process Mass Spectrometers

Nano Imprint

Nano Hot Embossing

X-Ray scanner

EUV Spectrograph

X-ray Monochromator

Jenoptik Mikrotechnik

Hot embossing systems for R7D to productionX-Ray Monochromators; X-ray scanner (large field) EUV spectrograph.

Deposition Rate Controller

Telemark

Model 880 deposition controller

Plasma Chemistry Monitor

Telemark

Plasma Diagnostic and Endpoint

In-Situ Spectroscopic Optical monitor

Telemark

Full Spectrum Real time analysis and Control of Reflectance and Transmittance during Thin-Film Deposition Model 820

Photolithography Process Monitoring/Control

Telemark

APT Model 2230, real time in line measurement of film thickness, transmission and reflectivity

Automated wet chemical processing System

Telemark

APT system, more than 1,000 systems in the field. For clean, etch, strip, develop, strip and etch etc.

Wafer Services for Semiconductor and Bio-medical Industry

Telemark

TFI wafer services for 4, 6 and 8” wafers, including: spins, pre-etch, SEM, Strip, thermal Oxide, LPCVD, PVD amongst other services

 
  Location
 

Midwest Vacuum, Inc.
201 E. Ogden Avenue
Suite 15
Hinsdale, IL 60521

Tel 630-323-5399
Fax 630-323-2142

Contact

 
© 2006 Midwest Vacuum, Inc.